US20040020173A1 - Low temperature anodic bonding method using focused energy for assembly of micromachined systems - Google Patents
Low temperature anodic bonding method using focused energy for assembly of micromachined systems Download PDFInfo
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- US20040020173A1 US20040020173A1 US10/208,309 US20830902A US2004020173A1 US 20040020173 A1 US20040020173 A1 US 20040020173A1 US 20830902 A US20830902 A US 20830902A US 2004020173 A1 US2004020173 A1 US 2004020173A1
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K9/00—Medicinal preparations characterised by special physical form
- A61K9/0087—Galenical forms not covered by A61K9/02 - A61K9/7023
- A61K9/0097—Micromachined devices; Microelectromechanical systems [MEMS]; Devices obtained by lithographic treatment of silicon; Devices comprising chips
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K9/00—Medicinal preparations characterised by special physical form
- A61K9/0002—Galenical forms characterised by the drug release technique; Application systems commanded by energy
- A61K9/0009—Galenical forms characterised by the drug release technique; Application systems commanded by energy involving or responsive to electricity, magnetism or acoustic waves; Galenical aspects of sonophoresis, iontophoresis, electroporation or electroosmosis
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/02—General characteristics of the apparatus characterised by a particular materials
- A61M2205/0244—Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
Definitions
- U.S. Pat. No. 5,366,454 discloses a medication dispensing device for implantation into an animal or human body, and including a substrate having a plurality of compartments, a closure member, a rupturable membrane and a membrane rupturing system. Each compartment has a charging opening for charging the compartment with a dose of medicine and a delivery opening permitting delivery of the medicine.
- the closure member, made of silicon is anodically bonded to the substrate, also made of silicon, for sealing the charging openings of the compartments.
- the membrane, made of silicon may be integrally formed with the substrate or anodically bonded to the substrate, also made of silicon, for sealing the delivery openings of the compartments.
- the device further includes a control circuit connected to a power source for supplying the electrical signal to a respective piezoelectric transducer of each membrane rupturing system to activate the respective piezoelectric transducer.
- a biologically compatible polymeric film covers the membrane to bind any broken membrane fragments to the device and to prevent the fragments from being released into the human or animal.
- Eutectic bonding and glass-frit bonding use a film of metal and glass ceramic adhesive, respectively, to hermetically seal the substrates together under high temperature.
- Microwave bonding uses electromagnetic energy to bond two metallized dielectric or silicon substrates to each other.
- the electromagnetic energy in the form of a pulse heats the metallic interface between the two substrates to melt the interface together while permitting the substrates to remain cool.
- a medicine delivery system adapted to be implanted in a human or animal, that actively releases a drug or other molecule into the animal or human by rupturing a membrane, without permitting the ruptured membrane to separate from the medicine delivery system and to be released in the animal or human.
- a medicine delivery system adapted to be implanted in a human or animal, that actively releases a drug or other molecule into the animal or human by rupturing a membrane, without permitting the ruptured membrane to separate from the medicine delivery system and to be released in the animal or human.
- Such a system would not permit disintegrated membrane material to separate from the drug delivery device and to be released in the animal or human, as disclosed in U.S. Pat. No. 6,123,861 (Santini, Jr., et al.). Further, such a system would not require the biologically compatible polymeric film shown as necessary by U.S. Pat. No. 5,366,454 (Currie, et al.) to bind any broken membrane fragments to the device and to prevent the fragment
- the bonding process seals the two substrates together at a relatively low voltage.
- FIG. 5 illustrates a longitudinal cross-sectional view of the medicine delivery unit taken along line 5 - 5 in FIG. 3, before the membrane is ruptured.
- FIGS. 7 A- 7 K illustrate, in a sequence of steps, a MEMS fabrication process for making the medicine delivery unit, as shown in FIGS. 1 - 6 , in accordance with the preferred embodiment of the present invention.
- Each compartment 18 may contain different medicines 34 depending on the medical needs of the patient or other requirements of the medicine delivery system 10 .
- the medicines 34 in each of the rows can differ from each other.
- the rate of the release of the medicine 34 may differ within each row to release a medicine at a fast rate from one compartment 18 and a slow rate from another compartment 18 .
- Each compartment 18 may also contain different dosages of the medicines 34 . The dosages may also vary within each row of medicine delivery units 14 .
- the compartments 18 are etched into a silicon substrate by potassium hydroxide in the shape of a square pyramid, having side walls sloped at approximately fifty-four degrees, which pass completely through the substrate (approximately 300 micrometers) to the membrane 26 on the other side of the substrate 16 , as shown in FIG. 7.
- the pyramidal shape permits easy filling of the compartments 18 through the charging opening 20 (approximately 500 micrometers by 500 micrometers) on a patterned side of the substrate 16 , release through the delivery opening 22 (approximately 50 micrometers by 50 micrometers) on the other side of the substrate 16 , and provides a large cavity inside the medicine delivery unit 14 for storing the medicine.
- the predetermined rupture pattern preferably approximates the size and shape of the release element 28 .
- the predetermined rupture pattern has a width in the range of 2 to 20 micrometers, a length of a side of the delivery opening 22 in the range of 40 to 500 micrometers, and spacing between the predetermined rupture pattern and the edge of the delivery opening 22 in the range of 2 to 20 micrometers.
- the membrane 26 is hermetically sealed over the delivery openings 22 to form a vacuum in the compartments 18 .
- Various mechanisms for forming the vacuum seal include, without limitation, wide area heating mechanisms such as electrostatic bonding, and local area heating sources such as laser, microwave, and infrared energy.
- the local area heating mechanisms are preferred over the wide area heating mechanisms because the local area heating mechanisms operate at a lower temperature (e.g., 100-150 degrees C.) rather than at a higher temperature (e.g., 300-400 degrees C.). Using the lower temperature over the local area prevents damage to the medicine delivery unit 10 and to the medicine 34 , and creates more strain on the membrane 26 due to the high temperature gradient along the membrane 26 from the local area to the center of the membrane 26 .
- FIGS. 7 A- 7 K illustrate, in a sequence of steps, a MEMS fabrication process for making the medicine delivery unit 14 , as shown in FIGS. 1 - 6 , in accordance with the preferred embodiment of the present invention.
- FIG. 7A illustrates the step of providing the substrate 16 .
- FIG. 7B illustrates the substrate 16 having the membrane 26 applied to each opposite side of the substrate 16 .
- material 38 for the release element 28 is applied to the membrane 26 on one side of the substrate 16 .
- FIG. 7D the material 38 for the release element 28 is selectively removed to form the release element 28 .
- the insulator 40 is selectively applied to the membrane 26 and the membrane material on the bottom side of the substrate 16 is selectively removed.
- FIG. 7A illustrates the step of providing the substrate 16 .
- FIG. 7B illustrates the substrate 16 having the membrane 26 applied to each opposite side of the substrate 16 .
- material 38 for the release element 28 is applied to the membrane 26 on one side of the substrate 16 .
- FIG. 7D
- the focused energy 54 does not necessarily need to be aligned with particular features of the medicine delivery system 10 , depending on the size of the features, the power level and time duration of the focused energy.
- the method 60 ends. Although, the method 60 describes a bonding process for assembly of the medicine delivery system 10 , the method may be used for any kind of micromachined system or device.
Abstract
A method for assembling a medicine delivery system (10) includes providing a substrate (16) with a plurality of compartments (18), filling the compartments (18) with medicine (34), covering the compartments (18) with a cap (24), heating the system (10) at a relatively low temperature, applying a voltage bias (56) across the substrate (16) and the cap (24), and applying focused energy (54) to the substrate (16) and/or the cap (24) to seal them together and create a vacuum in the compartments (18).
Description
- The present invention generally relates to bonding methods for assembly of micromachined systems. More particularly, the present invention relates to a low temperature anodic bonding method using focused energy for assembly of micromachined systems.
- Medicine delivery is an important aspect of medical treatment. The efficacy of many medicines is directly related to the way in which they are administered. Some therapies require that the medicine be repeatedly administered to the patient over a long period of time. This makes the selection of a proper medicine delivery method problematic. Patients often forget, are unwilling, or are unable to take their medication. Medicine delivery also becomes problematic when the medicines are too potent for systemic delivery. Therefore, attempts have been made to design and fabricate a delivery device that is capable of the controlled, periodic or continuous release of a wide variety of molecules including, but not limited to, drugs and other therapeutics.
- Micro-electro-mechanical system (MEMS) technology integrates electrical components and mechanical components on a common silicon substrate using microfabrication technology. Integrated circuit (IC) fabrication processes, such as photolithography processes and other microelectronic processes, form the electrical components. The IC fabrication processes typically use materials such as silicon, glass, and polymers. Micromachining processes, compatible with the IC processes, selectively etch away areas of the IC or add new structural layers to the IC to form the mechanical components. The integration of silicon-based microelectronics with micromachining technology permits complete electromechanical systems to be fabricated on a single chip. Such single chip systems integrate the computational ability of microelectronics with the mechanical sensing and control capabilities of micromachining to provide smart devices small enough to be implanted inside of a human or animal.
- Examples of implantable medicine delivery systems suitable for fabrication using microelectro-mechanical system (MEMS) technology are described in U.S. Pat. No. 5,366,454 (Currie, et al.), and U.S. Pat. No. 6,123,861 (Santini, Jr., et al.). These patents are described as improvements over non-MEMS type of electromechanical devices that are larger and less reliable and controlled release polymeric devices, designed to provide medicine release over a period of time via diffusion of the medicine through the polymer and/or degradation of the polymer over the desired time period following administration to the patient.
- U.S. Pat. No. 5,366,454 (Currie, et al.) discloses a medication dispensing device for implantation into an animal or human body, and including a substrate having a plurality of compartments, a closure member, a rupturable membrane and a membrane rupturing system. Each compartment has a charging opening for charging the compartment with a dose of medicine and a delivery opening permitting delivery of the medicine. The closure member, made of silicon, is anodically bonded to the substrate, also made of silicon, for sealing the charging openings of the compartments. The membrane, made of silicon, may be integrally formed with the substrate or anodically bonded to the substrate, also made of silicon, for sealing the delivery openings of the compartments. The membrane has a predetermined elastic deformation limit and a predetermined rupture point. A “V-shaped” groove is formed in the membrane to define a line of weakness to assist the rupture of the membrane. The membrane rupturing system associated with each compartment ruptures the membrane thereof in response to an electrical signal. The membrane rupturing system includes a stress-inducing member maintaining the membrane stressed to substantially the elastic deformation limit thereof, and a piezoelectric transducer responsive to the electrical signal for applying to the membrane additional stress sufficient to exceed the rupture point of the membrane, thereby causing the membrane to rupture. Upon rupture of the membrane, body fluids are permitted to enter into the compartment for mixing with the medicine contained therein so that the medicine is released in admixture with the body fluids through the delivery opening into the animal or human body. The device further includes a control circuit connected to a power source for supplying the electrical signal to a respective piezoelectric transducer of each membrane rupturing system to activate the respective piezoelectric transducer. However, a biologically compatible polymeric film covers the membrane to bind any broken membrane fragments to the device and to prevent the fragments from being released into the human or animal.
- U.S. Pat. No. 6,123,861 (Santini, Jr., et al.) discloses a microchip drug delivery device for controlling the rate and time of delivery of molecules, such as medicines, in either a periodic or continuous manner. This device typically includes hundreds to thousands of reservoirs, or wells, formed in a silicon substrate containing the molecules and a release element that controls the rate of release of the molecules. The reservoirs can contain multiple medicines or other molecules in variable dosages. The filled reservoirs can be capped with materials that passively disintegrate, materials that allow the molecules to diffuse passively out of the reservoir over time, or materials that disintegrate upon application of an electric potential. Release from an active device can be controlled by a preprogrammed microprocessor, remote control, or by biosensors.
- Several methods are used to bond silicon wafers together or to other substrates, such as glass substrates, to form larger or more complex micromachined systems, such as medicine delivery systems, including: adhesion bonding, anodic bonding, eutectic bonding, glass-frit bonding, fusion bonding, low temperature fusion bonding, and microwave bonding. Among these various bonding methods engineering tradeoffs exist for the applied temperature, applied voltage, applied pressure, applied energy, bonding time, bond strength, material cost, etc.
- Adhesion bonding uses an adhesive to bond the substrates together. This is typically done by spin coating a thin film of adhesive on one or both substrates before they are brought into contact. The substrates are typically baked at a prescribed temperature to cure the adhesive.
- Anodic bonding, otherwise known as electrostatic bonding, typically hermetically and permanently joins glass to silicon substrates without using adhesives. The glass substrate contains typically has a high percentage of alkali metals, such as sodium oxide. The silicon and glass substrates are brought into contact with each other. The silicon and glass substrates are heated to a temperature (typically in the range 300-500° C. depending on the glass type) above the softening point of the glass substrate that results in the sodium oxide splitting up into sodium and oxygen ions. A high DC voltage (e.g., up to 1 kV) is applied across the substrates creating an electrical field that penetrates the substrates. The electric field causes the sodium ions to migrate from the interface between the substrates towards the cathode where they are neutralized providing a depletion layer with high electric field strength. The resulting electrostatic attraction at the depletion layer brings the silicon and glass into intimate contact. The electric field also causes the oxygen ions to flow from the glass substrate to the silicon substrate resulting in an anodic reaction at the interface with the silicon ions in the silicon substrate to form irreversible silicon-oxygen-silicon bonds. The result is that the glass substrate is bonded to the silicon substrate with a permanent chemical bond. The disadvantages of anodic bonding include the relatively high temperature required, temperature non-uniformity during vacuum sealing, and relatively long bond times (e.g., 10 minutes).
- Eutectic bonding and glass-frit bonding use a film of metal and glass ceramic adhesive, respectively, to hermetically seal the substrates together under high temperature.
- Fusion bonding uses two silicon substrates having hydrophobic or hydrophilic, mirror-polished, flat and clean surfaces. The two surfaces of the substrates contact each other under high pressure creating atomic attraction forces that bond the two substrates together. The atomic attraction forces are strong enough to allow the bonded substrates to be moved to a furnace. The bonded substrates are annealed at high temperature (e.g., 900° C.-1100° C.) in the furnace to form a solid hermetic seal between the two substrates.
- Low temperature fusion bonding advances the glass-frit bonding process. In contrast to the glass-frit bonding process, low temperature fusion bonding does not use a glass ceramic adhesive to bond the substrates together. The low temperature fusion bonding process uses low heat to soften the substrates, and pressure to squeeze and hold the substrates together until they bond over a prescribed period of time.
- Microwave bonding uses electromagnetic energy to bond two metallized dielectric or silicon substrates to each other. The electromagnetic energy in the form of a pulse heats the metallic interface between the two substrates to melt the interface together while permitting the substrates to remain cool.
- It would be desirable to have a medicine delivery system, adapted to be implanted in a human or animal, that actively releases a drug or other molecule into the animal or human by rupturing a membrane, without permitting the ruptured membrane to separate from the medicine delivery system and to be released in the animal or human. Such a system would not permit disintegrated membrane material to separate from the drug delivery device and to be released in the animal or human, as disclosed in U.S. Pat. No. 6,123,861 (Santini, Jr., et al.). Further, such a system would not require the biologically compatible polymeric film shown as necessary by U.S. Pat. No. 5,366,454 (Currie, et al.) to bind any broken membrane fragments to the device and to prevent the fragments from being released into the human or animal.
- It would also be desirable to have a bonding process to hermetically seal two substrates together at a temperature lower than the 300-500° C. range used for anodic bonding. Such a bonding process would not damage thermally degraded materials, like the medicine in the medication dispensing device disclosed in U.S. Pat. No. 5,366,454 (Currie, et al.). Such a bonding process would also be fast to provide high manufacturing throughput. Further, such a process would also apply a relatively low pressure to the substrates.
- According to one aspect of the present invention, a bonding process seals two substrates together at a relatively low temperature.
- According to another aspect of the present invention, the bonding process seals the two substrates together at a relatively low voltage.
- According to another aspect of the present invention, the bonding process seals the two substrates together at a relatively low pressure.
- According to another aspect of the present invention, the bonding process seals the two substrates together at a relatively high speed.
- According to another aspect of the present invention, the bonding process hermetically and vacuum seals the two substrates together.
- According to another aspect of the present invention, the bonding process seals the two substrates together using a combination of anodic bonding and focused energy bonding.
- According to another aspect of the present invention, a method bonds substrates in a micromachined system. A first substrate and a second substrate are provided. The first substrate is placed in contact with the second substrate. Heat is applied to the micromachined system. A bias voltage bias is applied across the first substrate and the second substrate. Focused energy is applied to at least one of the first substrate and the second substrate to seal the first substrate to the second substrate.
- These and other aspects of the present invention are further described with reference to the following detailed description and the accompanying figures, wherein the same reference numbers are assigned to the same features or elements illustrated in different figures. Note that the figures may not be drawn to scale. Further, there may be other embodiments of the present invention explicitly or implicitly described in the specification that are not specifically illustrated in the figures and vice versa.
- FIG. 1 illustrates a perspective view of a medicine delivery system, including a control unit and a plurality of medicine delivery units, in accordance with a preferred embodiment of the present invention.
- FIG. 2 illustrates a magnified partial top plan view of the medicine delivery system of FIG. 1.
- FIG. 3 illustrates a magnified top plan view of a medicine delivery unit, as shown in FIGS. 1 and 2, having a release element disposed on a membrane.
- FIG. 4 illustrates a magnified lateral cross-sectional view of the medicine delivery unit taken along line4-4 in FIG. 3.
- FIG. 5 illustrates a longitudinal cross-sectional view of the medicine delivery unit taken along line5-5 in FIG. 3, before the membrane is ruptured.
- FIG. 6 is a longitudinal cross-sectional view similar to FIG. 5 but shows the medicine delivery unit after the membrane is ruptured.
- FIGS.7A-7K illustrate, in a sequence of steps, a MEMS fabrication process for making the medicine delivery unit, as shown in FIGS. 1-6, in accordance with the preferred embodiment of the present invention.
- FIG. 8 illustrates a flowchart describing a method for sealing the medicine delivery unit, as shown in FIGS.1-6, in accordance with the preferred embodiment of the present invention.
- FIG. 9 illustrates a block diagram of the control unit and the medicine delivery units, as shown in FIGS. 1 and 2, in accordance with the preferred embodiment of the present invention.
- FIG. 1 illustrates a perspective view of a
medicine delivery system 10, including acontrol unit 12 and a plurality of spaced-apartmedicine delivery units 14, in accordance with a preferred embodiment of the present invention. Themedicine delivery system 10 is fabricated using the MEMS technology, as described above, using methods commonly applied to the manufacture of integrated circuits such as ultraviolet (UV) photolithography, reactive ion etching, and electron beam evaporation, as are well known in the art. The MEMS technology fabrication procedure permits the manufacture ofmedicine delivery systems 10 with primary dimensions (length of a side if square or rectangular, or diameter if circular) ranging from less than a millimeter to several centimeters. The thickness of a typicalmedicine delivery system 10 is 300 micrometers, but can vary from approximately 10 micrometers to several millimeters, depending on the system's application. Changing the system thickness affects the maximum number ofmedicine delivery units 14 that may be incorporated into the system and the volume of eachmedicine delivery unit 14. “In body” applications of the device would typically require systems having a primary dimension of 2 cm or smaller. Systems for in body applications are small enough to be swallowed or implanted using minimally invasive procedures. Smaller in body systems (on the order of a millimeter) can be implanted using a catheter or other injection means. - Preferably, the
medicine delivery system 10 has a small wafer-like substrate 16 providing the plurality of spaced-apartmedicine delivery units 14. Thesubstrate 16 serves as a support for themedicine delivery device 10. Thesubstrate 16 may be any material that is suitable for etching or machining, for providing a support, and is impermeable to medicines and to surrounding body fluids, such as, water, blood, electrolytes or other solutions. Examples of materials, suitable for thesubstrate 16, include, without limitation, ceramics, semiconductors, glass, and degradable and non-degradable polymers. - Biocompatibility of the substrate material is preferred, but not required. For in body applications, non-biocompatible materials may be encapsulated in a biocompatible material, such as poly(ethylene glycol) or polytetrafluoroethylene-like materials, before use. Silicon is an example of a material that forms a strong, non-degradable, easily etched substrate that is impermeable to the enclosed medicines and the surrounding body fluids. Poly(anhydride-co-imide) is an example of a material that forms a strong substrate that degrades or dissolves over a period of time into biocompatible components. This material is preferred for in body applications where the system is implanted and physical removal of the device at a later time is not feasible or recommended.
- Each
medicine delivery unit 14 has acompartment 18, adapted to contain or enclose a medicine 34 (shown in FIGS. 4-7), which is defined by a cavity, a recess, or a reservoir formed in thesubstrate 16 by etching, machining, or other known process. Thecompartments 18 are each provided with a chargingopening 20 permitting receipt ofmedicine 34 in thecompartment 18, and with adelivery opening 22 permitting delivery of the medicine contained therein. Acap 24 seals the chargingopenings 20, preferably using a bonding method described in FIG. 8, or a waterproof epoxy or other appropriate material impervious to the surrounding fluids. Amembrane 26 seals thedelivery openings 22. - As best seen in FIG. 4, the
medicine 34 is inserted into the chargingopening 20 of thecompartment 18 by any method including, without limitation, injection, inkjet printing, spin coating, capillary action, pulling or pushing the medicine using a vacuum or other pressure mechanism, melting the material into thecompartment 18, centrifugation and related processes, packing solids into thecompartment 18, or any combination of these or other similar filling techniques. - The
medicine 34 may be a solid, liquid or gel in thecompartments 18. Preferably, themedicine 34 is formed as a solid because the solid medicine has a high concentration per unit volume, such as for example in the pico-gram range. Themedicine 34 may be any natural, synthetic, or semi-synthetic compound or mixture thereof that can be delivered. In one embodiment, themedicine delivery system 10 is used to deliver medicines systemically to a patient in need thereof. In another embodiment, the construction and placement of themedicine delivery system 10 in a patient enables the localized release ofmedicines 34 that may be too potent for systemic delivery. As used herein, medicines are compounds or salts, prodrugs, solvates, salts and/or solvates of prodrugs thereof, including, without limitation, proteins, nucleic acids, polysaccharides and synthetic organic molecules, having a bioactive effect, for example, anesthetics, vaccines, chemotherapeutic agents, hormones, metabolites, sugars, immunomodulators, antioxidants, ion channel regulators, and antibiotics. Themedicines 34 can be in the form of a single medicine or medicine mixtures and can include pharmaceutically acceptable carriers. In another embodiment, molecules are released in body in any system where the controlled release of a small (milligram to nanogram) amount of one or more molecules is required, for example, in the fields of analytic chemistry or medical diagnostics. Molecules can be effective as pH buffering agents, diagnostic agents, and reagents in complex reactions such as the polymerase chain reaction or other nucleic acid amplification procedures. - Each
compartment 18 may containdifferent medicines 34 depending on the medical needs of the patient or other requirements of themedicine delivery system 10. For applications in medicine delivery, for example, themedicines 34 in each of the rows can differ from each other. Further, the rate of the release of themedicine 34 may differ within each row to release a medicine at a fast rate from onecompartment 18 and a slow rate from anothercompartment 18. Eachcompartment 18 may also contain different dosages of themedicines 34. The dosages may also vary within each row ofmedicine delivery units 14. - For in body applications, the entire
medicine delivery system 10, except for the side of themedicine delivery system 10 providing thedelivery openings 22 on themedicine delivery units 14, is encased in a material appropriate for thesystem 10. For in body applications, themedicine delivery system 10 is preferably encapsulated in a biocompatible material such as poly(ethylene glycol) or polytetrafluoroethylene. - Use of MEMS technology fabrication techniques permit the incorporation of hundreds to thousands of
compartments 18 in a singlemedicine delivery system 10. The spacing between eachcompartment 18 depends on its particular application and whether or not the release of the medicine is active or passive. With an active release, the distance between the reservoirs may be slightly larger (between approximately 1 and 10 micrometer) than with a passive release due to the space occupied by a release element (not shown in FIG. 1) on or near eachcompartment 18. Thecompartments 18 may be made in nearly any shape and depth, and need not pass completely through thesubstrate 16. In a preferred embodiment, thecompartments 18 are etched into a silicon substrate by potassium hydroxide in the shape of a square pyramid, having side walls sloped at approximately fifty-four degrees, which pass completely through the substrate (approximately 300 micrometers) to themembrane 26 on the other side of thesubstrate 16, as shown in FIG. 7. The pyramidal shape permits easy filling of thecompartments 18 through the charging opening 20 (approximately 500 micrometers by 500 micrometers) on a patterned side of thesubstrate 16, release through the delivery opening 22 (approximately 50 micrometers by 50 micrometers) on the other side of thesubstrate 16, and provides a large cavity inside themedicine delivery unit 14 for storing the medicine. - Referring next to FIGS.2-6, FIG. 2 illustrates a magnified partial top plan view of the
medicine delivery system 10, of FIG. 1. FIG. 3 illustrates a magnified top plan view of amedicine delivery unit 14, as shown in FIGS. 1 and 2, having arelease element 28 disposed on themembrane 26. FIG. 4 illustrates a magnified lateral cross-sectional view of themedicine delivery unit 14, as shown in FIG. 3, having therelease element 28 disposed on themembrane 26. FIG. 5 illustrates a longitudinal elevation view of themedicine delivery unit 14, as shown in FIG. 3, before themembrane 26 is ruptured, in accordance with the preferred embodiment of the present invention. FIG. 6 illustrates the longitudinal elevation view of themedicine delivery unit 14, as shown in FIG. 3, after themembrane 26 is ruptured, in accordance with the preferred embodiment of the present invention. - The
release element 28 is associated with eachmedicine delivery unit 14 for rupturing themembrane 26 in response to a control signal 78 (shown in FIG. 9) from thecontrol unit 12. The size, shape and placement of therelease element 28 may vary, depending on various engineering considerations for the particular application. Therelease element 28 is preferably disposed on themembrane 26, either inside and/or outside thecompartment 18, using deposition techniques such as chemical vapor deposition, electron or ion beam evaporation, sputtering, spin coating, and other techniques known in the art. Various release elements may be used to rupture themembrane 26 including, without limitation, electrostatic, magnetic, piezoelectric, bimorph, shape memory alloys, temperature, chemical, and other mechanisms that cause stress or strain on themembrane 26. - When a temperature element such as a polysilicon piezoresistor is used as the release element28 a thermal insulator, such as silicon dioxide, may be used as the
membrane 26 to isolate the temperature element from themedicine 34, if desired. Thesubstrate 16 is preferably formed of silicon and acts as a heat sink. The thermal conductivity for silicon is 1.57 W/cm-degrees C., for silicon dioxide is 0.014 W/cm-degrees C., and for polysilicon is 0.17 W/cm-degrees C. When thetemperature element 28 is heated, themembrane 26 cracks due to the high thermal gradient induced stresses on themembrane 26 causing themedicine delivery unit 14 to open. A thin film of tensile silicon nitride may be applied to themembrane 26 to assist in opening themedicine delivery unit 14 when the temperature element is heated. After themembrane 26 is ruptured, the tensile silicon nitride pulls themembrane 26 back to assist in forming thedelivery opening 22. - The
release element 28 is electrically coupled to thecontrol unit 12 viaelectrodes electrodes electrodes membrane 26 ruptures along a predetermined pattern to expose thecompartment 18 containing themedicine 34 to the surrounding fluids. - The predetermined rupture pattern preferably approximates the size and shape of the
release element 28. Preferably, the predetermined rupture pattern has a width in the range of 2 to 20 micrometers, a length of a side of thedelivery opening 22 in the range of 40 to 500 micrometers, and spacing between the predetermined rupture pattern and the edge of thedelivery opening 22 in the range of 2 to 20 micrometers. - An insulating or
dielectric material 40 such as silicon oxide (SiO2) or silicon nitride (SiN2) is deposited over the entire surface of themedicine delivery system 10 by methods such as chemical vapor deposition, electron or ion beam evaporation, sputtering, or spin coating and other techniques known in the art. Photoresist (not shown) is patterned on top of thedielectric material 40 to protect it from etching except on therelease element 28 directly over eachcompartment 18. Thedielectric material 40 can be etched by plasma, ion beam, or chemical etching techniques. The purpose of thisdielectric material 40 and photoresist film is to protect theelectrodes medicine 34. - The
membrane 26 has a predetermined elastic deformation limit and a predetermined rupture point. Themembrane 26 may be formed of a variety of materials including, without limitation, dielectric, polysilicon or silicon. Themembrane 26 may have a line of weakness formed therein along the predetermined rupture pattern to assist with rupturing themembrane 26. Preferably, themembrane 26 is thinner at the line of weakness than at other areas of themembrane 26. Such thinning may be formed by a V-shaped indentation in themembrane 26. Preferably, themembrane 26 is integrally formed with thesubstrate 16. Alternatively, themembrane 26, can be formed separately from thesubstrate 16 and bonded thereto, such as with a membrane, formed of silicon, anodically bonded to asubstrate 16, also formed of silicon. - Preferably, the
membrane 26 is hermetically sealed over thedelivery openings 22 to form a vacuum in thecompartments 18. Various mechanisms for forming the vacuum seal include, without limitation, wide area heating mechanisms such as electrostatic bonding, and local area heating sources such as laser, microwave, and infrared energy. The local area heating mechanisms are preferred over the wide area heating mechanisms because the local area heating mechanisms operate at a lower temperature (e.g., 100-150 degrees C.) rather than at a higher temperature (e.g., 300-400 degrees C.). Using the lower temperature over the local area prevents damage to themedicine delivery unit 10 and to themedicine 34, and creates more strain on themembrane 26 due to the high temperature gradient along themembrane 26 from the local area to the center of themembrane 26. In this case, eachcompartment 18 is drawn under a vacuum causing themembrane 26 to be drawn inward into thecompartment 18 forming a concave shape. Under the vacuum, themembrane 26 is strained to a point near to but less than the predetermined elastic deformation limit and the predetermined rupture point of themembrane 26. Since thecompartment 18 is under vacuum, themembrane 26 is in a pre-stressed condition. Therelease element 28 causes themembrane 26 to bend past its yield point resulting themembrane 26 rupturing along the predetermined pattern. Because themembrane 26 is already in a pre-stressed state, therelease element 28 does not require as much energy to rupture themembrane 26, as compared to amembrane 26 that is not in a pre-stressed state. - The
membrane 26 has afirst portion 35 located inside the predetermined pattern and asecond portion 37 located outside the predetermined pattern. Thefirst portion 35 of themembrane 26 is attached to thesecond portion 37 of themembrane 26 at aconnection area 39. In the preferred embodiment of the present invention, thefirst portion 35 of themembrane 26 forms a lid and theconnection area 39 forms ahinge 36. When themembrane 26 ruptures, the lid separates from thesecond portion 37 of themembrane 26, except at thehinge 36, to permit themedicine 34 to be delivered through thedelivery opening 22, as shown in FIG. 6. Thehinge 36 permits the lid to remain attached to themedicine delivery system 10 so that it is not released in the animal or human. Thefirst portion 35 of themembrane 26 and theconnection area 39 may have various sizes, shapes and positions, depending on various engineering considerations for a particular application. - FIGS.7A-7K illustrate, in a sequence of steps, a MEMS fabrication process for making the
medicine delivery unit 14, as shown in FIGS. 1-6, in accordance with the preferred embodiment of the present invention. FIG. 7A illustrates the step of providing thesubstrate 16. FIG. 7B illustrates thesubstrate 16 having themembrane 26 applied to each opposite side of thesubstrate 16. In FIG. 7C,material 38 for therelease element 28 is applied to themembrane 26 on one side of thesubstrate 16. In FIG. 7D, thematerial 38 for therelease element 28 is selectively removed to form therelease element 28. In FIG. 7B, theinsulator 40 is selectively applied to themembrane 26 and the membrane material on the bottom side of thesubstrate 16 is selectively removed. In FIG. 7F, themedicine delivery unit 14 is turned over 180 degrees, either physically or for the sake of illustration. In FIG. 7G, thesubstrate 16 is etched or machined between the remaining portions of the membrane material to form thecompartment 18 and the chargingopening 20. In FIG. 7H, the remaining portions of the membrane material are removed. Alternatively, the remaining portions of the membrane material stay depending on the type of material. In FIG. 7I, thecompartment 18 is filled with themedicine 34. In FIG. 7J, thecap 24 is disposed over thecompartment 18 to seal the chargingopening 20 under vacuum, according to the method 60 described in FIG. 8. In FIG. 7K, themedicine delivery unit 14 is again turned over 180 degrees, either physically or for the sake of illustration. - FIG. 8 illustrates a flowchart describing a method60 for sealing the
medicine delivery unit 10, as shown in FIGS. 7A-7K. The method 60 starts atstep 61. Atstep 62, the method 60 provides thesubstrate 16, having thecompartments 18, and thecap 24 in an appropriate manner for high volume manufacturing. Atstep 63, the method 60 charges thecompartments 18 with themedicine 34, as describe above. Atstep 64, the method 60 covers thecompartments 18 with thecap 24, as described above. Atstep 65, the method 60 appliesheat 58 to themedicine delivery system 10. In the preferred embodiment of the present invention the heat is less than 100 degrees C., which is much less than the 300-500 degrees C. temperature range used for traditional anodic bonding. Atstep 66, the method 60 applies avoltage bias 56 across thesubstrate 16 and thecap 24. Preferably, a positive voltage is applied to thecap 24 and a negative voltage is applied to thesubstrate 16. Alternatively, the positive and negative voltages may be reversed, depending on the materials of thecap 24 and thesubstrate 16. In the preferred embodiment of the present invention, thevoltage bias 56 is greater than 100 V and less than the 1 kV used for traditional anodic bonding. Atstep 67, the method 60 applies focusedenergy 54 to thecap 24 to seal thecap 24 to thesubstrate 16 and to create a vacuum in thecompartments 18. Thefocused energy 54 includes, without limitation, microwave, laser, infrared, lamps, and the like. Thefocused energy 54 couples into the cap 24 (e.g., at a wavelength less than 600 nm) to raise the temperature in a local area over one ormore compartments 18 for the duration of an energy pulse having a microsecond to millisecond time duration. Such fast heat coupling assists in bonding the interface between thecap 24 and thesubstrate 16, without damaging thecap 24, thesubstrate 16, or themedicine 34. Silicon material conducts heat quickly and glass material and a vacuum conducts heat slowly. Therefore, when thecap 24 is made of silicon and thesubstrate 16 is made of glass, thefocused energy 54 conducts slowly to themedicine 34. Note that thefocused energy 54 does not necessarily need to be aligned with particular features of themedicine delivery system 10, depending on the size of the features, the power level and time duration of the focused energy. Atstep 68, the method 60 ends. Although, the method 60 describes a bonding process for assembly of themedicine delivery system 10, the method may be used for any kind of micromachined system or device. - The benefits of the bonding process described in the method60 include: a fast manufacturing throughput, uniform seals, no damage to the
medicine 34, a low bonding temperature permitting more design flexibility and stable mechanical dimensions with temperature, a flat assembly process, no measurable flow of the glass material permitting sealing around previously machined grooves, cavities etc. without any loss of dimensional tolerances, parasitic capacitances are kept extremely small because the glass material is an insulator, the bonding process may be performed in vacuum permitting hermetically sealed reference cavities to be formed, transparency of the glass at optical wavelengths permits simple, but highly accurate, alignment of pre-patterned glass and silicon wafers as well as to observe the inside of micro-fluidic devices, a high yield process that is tolerant to particle contamination and wafer warp because the electrostatic field generates a high clamping force which overcomes surface irregularities, a low cost wafer scale process for first order packaging can be done at a chip level if required, multi-layer stacks permit easy routing to complex 3-D microstructures, and a high strength bond that is higher than the fracture strength of the glass material. - FIG. 9 illustrates a block diagram of the
control unit 12 and themedicine delivery units 14, as shown in FIGS. 1 and 2, in accordance with the preferred embodiment of the present invention. Themedicine delivery system 10 accurately deliversmedicine 34 at defined rates and times according to the needs of a human or animal patient or other experimental system. Thecontrol unit 12 includes acontroller 70, amemory 72, asensor 15, apower supply 74, and ademultiplexer 76. Preferably, thecontrol unit 12 is constructed as an integrated circuit, but may be constructed as discrete circuits. Thecontrol unit 12 may have internal or external memory, such as RAM and/or ROM. - The
power supply 74 provides power to the appropriate functions in thecontrol unit 12, such as thecontroller 70. Preferably, thepower supply 74 is a battery to permit portable or in body applications, and is preferably a thin film electrochemical cell deposited on thesubstrate 16. The criteria for selection of the power supply are small size, sufficient power capacity, ability to be integrated into thecontrol unit 12, and, in some applications, the ability to be recharged and the length of time before recharging is necessary. Alternative batteries of this type include lithium-based, rechargeable micro-batteries that are typically only ten microns thick and occupy 1 cm2 of area. One or more of these batteries can be incorporated directly into thecontrol unit 12. - The
controller 70 generates thecontrol signal 78 to control themedicine delivery units 14. Thecontrol signal 78 may be carried on a single line carrying multiple signals, wherein each of the multiple signals is associated with a correspondingmedicine delivery unit 14. Alternatively, the control signal may be carried on a plurality of lines, wherein each of the plurality of lines is associated with eachmedicine delivery unit 14. Hence, thecontroller 70 in combination with thecontrol signal 78 actively controls the rupturing of themembrane 26 for eachmedicine delivery unit 14. - The
control unit 12 is designed based on the period over which the medicine delivery is desired, generally in the range of at least three to twelve months for in body applications. In contrast, release times as short as a few seconds may be desirable for some applications. In some cases, continuous (constant) release from thecompartment 18 may be most useful. In other cases, a pulse (bulk) release from thecompartment 18 may provide more effective results. Note that a single pulse medicine delivery from onecompartment 18 can be transformed into a multiple pulse medicine delivery by usingmultiple compartments 18. In addition, delivering several pulses of medicines in quick succession can simulate continuous medicine delivery. - The
controller 70 controls the time and rate of delivery of themedicine 34 from eachcompartment 18 responsive to a software program or circuit, remote control, a signal from a sensor, or by any combination of these methods. Preferably, thecontroller 70 is used in conjunction with thesensor 15, thememory 72, thepower supply 74, and thedemultiplexer 76. The software program stored in thememory 72 determines the time and rate of medicine delivery. Thememory 72 sends instructions to thecontroller 70. When the time for release has been reached as indicated by the software program, thecontroller 70 sends thecontrol signal 78 corresponding to the address (location) of aparticular compartment 18 to thedemultiplexer 76. Thedemultiplexer 76 generates an electrical signal to theparticular compartment 18 addressed by thecontroller 70. - The
sensor 15 advantageously provides a closed loop feedback system to permit themedicine delivery system 10 to vary the time, rate and/or dosages of the medicine responsive to monitored conditions in the environment, such as the human or animal body. - The
medicine delivery system 10 has numerous applications. Themedicine delivery system 10 can be used to deliver small, controlled amounts of chemical reagents or other molecules to solutions or reaction mixtures at precisely controlled times and rates. Analytical chemistry and medical diagnostics are examples of fields where themedicine delivery system 10 can be used. Themedicine delivery systems 10 can be implanted into a patient, either by surgical techniques or by injection, or can be swallowed. Themedicine delivery systems 10 provide delivery of medicines to animals or persons who are unable to remember or be ambulatory enough to take medication. Themedicine delivery systems 10 further provide delivery of many different medicines at varying rates and at varying times of delivery. - Hence, while the present invention has been described with reference to various illustrative embodiments thereof, the present invention is not intended that the invention be limited to these specific embodiments. Those skilled in the art will recognize that variations, modifications and combinations of the disclosed subject matter can be made without departing from the spirit and scope of the invention as set forth in the appended claims.
Claims (14)
1. A method for bonding substrates in a micromachined system, the method comprising the steps of:
providing a first substrate and a second substrate;
placing the first substrate in contact with the second substrate;
applying heat to the micromachined system;
applying a voltage bias across the first substrate and the second substrate; and
applying focused energy to at least one of the first substrate and the second substrate to seal the first substrate to the second substrate.
2. The method according to claim 1 , wherein the first substrate is made of glass and the second substrate is made of silicon.
3. The method according to claim 1 , wherein the heat is less than 100 degrees C.
4. The method according to claim 1 , wherein the voltage bias is between 100 V and 1 kV.
5. The method according to claim 1 , wherein the focused energy is provided by an energy source selected from a group of energy sources consisting of a microwave, a laser, an infrared, and a lamp source.
6. The method according to claim 1 , wherein the focused energy has a wavelength less than 600 nm.
7. The method according to claim 1 , wherein the micromachined system is a medicine delivery system, wherein the first substrate includes a plurality of compartments each having charging openings for receiving medicine, and wherein the second substrate forms a cap that covers the charging openings.
8. A method for assembling a medicine delivery system, the method comprising the steps of:
providing a substrate, having a plurality of compartments, and a cap;
charging each of the plurality of compartments with medicine;
covering the plurality of compartments with the cap;
applying heat to the medicine delivery system;
applying a voltage bias across the substrate and the cap; and
applying focused energy to at least one of the substrate and the cap to seal the cap to the substrate and to create vacuum in the plurality of compartments.
9. The method according to claim 8 , wherein the substrate is made of glass and the cap is made of silicon.
10. The method according to claim 8 , wherein the heat is less than 100 degrees C.
11. The method according to claim 8 , wherein the voltage bias is between 100 V and 1 kV.
12. The method according to claim 8 , wherein the focused energy is provided by an energy source selected from a group of energy sources consisting of a microwave, a laser, an infrared, and a lamp source.
13. The method according to claim 8 , wherein the focused energy has a wavelength less than 600 nm.
14. A method for assembling a medicine delivery system, the method comprising the steps of:
providing a substrate, having a plurality of compartments, and a cap, wherein the substrate is made of glass and the cap is made of silicon;
charging each of the plurality of compartments with medicine;
covering the plurality of compartments with the cap;
applying heat to the medicine delivery system, wherein the heat is less than 100 degrees C.;
applying a voltage bias across the substrate and the cap, wherein the voltage bias is between 100 V and 1 kV; and
applying focused energy, sourced from one of a microwave, a laser, an infrared, and a lamp source, to at least one of the substrate and the cap to seal the cap to the substrate and to create vacuum in the plurality of compartments, wherein the focused energy has a wavelength less than 600 nm.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/208,309 US20040020173A1 (en) | 2002-07-30 | 2002-07-30 | Low temperature anodic bonding method using focused energy for assembly of micromachined systems |
PCT/US2003/023518 WO2004011368A2 (en) | 2002-07-30 | 2003-07-29 | Low temperature anodic bonding method using focused energy for assembly of micromachined systems |
AU2003256917A AU2003256917A1 (en) | 2002-07-30 | 2003-07-29 | Low temperature anodic bonding method using focused energy for assembly of micromachined systems |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US10/208,309 US20040020173A1 (en) | 2002-07-30 | 2002-07-30 | Low temperature anodic bonding method using focused energy for assembly of micromachined systems |
Publications (1)
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US20040020173A1 true US20040020173A1 (en) | 2004-02-05 |
Family
ID=31186792
Family Applications (1)
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US10/208,309 Abandoned US20040020173A1 (en) | 2002-07-30 | 2002-07-30 | Low temperature anodic bonding method using focused energy for assembly of micromachined systems |
Country Status (3)
Country | Link |
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US (1) | US20040020173A1 (en) |
AU (1) | AU2003256917A1 (en) |
WO (1) | WO2004011368A2 (en) |
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US20040229444A1 (en) * | 2003-02-18 | 2004-11-18 | Couillard James G. | Glass-based SOI structures |
US20050175708A1 (en) * | 2002-05-02 | 2005-08-11 | Carrasquillo Karen G. | Drug delivery systems and use thereof |
US20050208103A1 (en) * | 1999-01-05 | 2005-09-22 | Adamis Anthony P | Targeted transscleral controlled release drug delivery to the retina and choroid |
US20060115323A1 (en) * | 2004-11-04 | 2006-06-01 | Coppeta Jonathan R | Compression and cold weld sealing methods and devices |
US20060167435A1 (en) * | 2003-02-18 | 2006-07-27 | Adamis Anthony P | Transscleral drug delivery device and related methods |
US20070264796A1 (en) * | 2006-05-12 | 2007-11-15 | Stocker Mark A | Method for forming a semiconductor on insulator structure |
US20090023271A1 (en) * | 2003-02-18 | 2009-01-22 | James Gregory Couillard | Glass-based SOI structures |
US20160074323A1 (en) * | 2014-09-11 | 2016-03-17 | International Business Machines Corporation | Microchip substance delivery devices having low-power electromechanical release mechanisms |
US10286198B2 (en) | 2016-04-08 | 2019-05-14 | International Business Machines Corporation | Microchip medical substance delivery devices |
US10544037B2 (en) * | 2015-07-17 | 2020-01-28 | Infineon Technologies Dresden Gmbh | Integrated semiconductor device and manufacturing method |
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US20160074323A1 (en) * | 2014-09-11 | 2016-03-17 | International Business Machines Corporation | Microchip substance delivery devices having low-power electromechanical release mechanisms |
US9937124B2 (en) * | 2014-09-11 | 2018-04-10 | International Business Machines Corporation | Microchip substance delivery devices having low-power electromechanical release mechanisms |
US20180133152A1 (en) * | 2014-09-11 | 2018-05-17 | International Business Machines Corporation | Microchip substance delivery devices having low-power electromechanical release mechanisms |
US10544037B2 (en) * | 2015-07-17 | 2020-01-28 | Infineon Technologies Dresden Gmbh | Integrated semiconductor device and manufacturing method |
US10881788B2 (en) | 2015-10-30 | 2021-01-05 | International Business Machines Corporation | Delivery device including reactive material for programmable discrete delivery of a substance |
US10286198B2 (en) | 2016-04-08 | 2019-05-14 | International Business Machines Corporation | Microchip medical substance delivery devices |
DE112018002960B4 (en) * | 2017-07-21 | 2021-07-01 | International Business Machines Corporation | LIQUID DISPENSING UNIT WITH HYDROPHOBIC SURFACE |
US11534585B2 (en) | 2017-07-21 | 2022-12-27 | International Business Machines Corporation | Fluid delivery device with hydrophobic surface |
NL2021872B1 (en) * | 2018-10-24 | 2020-05-13 | Medspray B V | Spray device and spray nozzle unit |
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Also Published As
Publication number | Publication date |
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WO2004011368A3 (en) | 2004-06-10 |
WO2004011368A2 (en) | 2004-02-05 |
AU2003256917A1 (en) | 2004-02-16 |
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